Gas Valve Manifold Box

Fäth Gas Valve Manifold Box is designed to distribute hazardous specialty gas from Bulk Specialty Gas Systems or Gas Cabinets while complying with applicable standards and guidelines to ensure that occupational health and safety standards are consistently met. The system is controlled using the integration of PLC and HMI to facilitate semi-automatic operations while providing the user with a visual overview of the system’s status at a glance. Various safety features are incorporated into the system to detect hazards and perform necessary functions automatically to mitigate accidents.

Kindly consult Fäth Asia for assistance in developing a system that meets your technical and commercial requirements.

Standard Features

  • Automatic system shutdown from hardware safety interlocks
  • Indicator lamps and buzzer for status information
  • Process gas flow rate configurations of 30 and 120 slpm of N2
  • Process gas flow rate configurations of 30 and 120 slpm of N2
  • All scales, sensors and transducers are connected to a manifold with connectors for easy component maintenance and replacement
  • Auxiliary media pressure sensors for venturi and pneumatic system
  • SEMI S2-0715 compliant

Enclosure Features

  • 11-gauge, non-combustible and corrosion resistant EG steel enclosure with chemical-resistant coating
  • Key lockable door with latching mechanism
  • 1/4″ wire-reinforced safety glass window

Control System

  • Siemens SIMATIC S7 series PLC
  • Siemens SIMATIC Comfort Panel HMI
  • User authorisation and password protection HMI
  • Multilingual operational guide on HMI
  • Manual actuation of pneumatic valves
  • Linkage to supervisory control and data acquisation (SCADA) system for remote system monitoring and control

Safety Features

  • Isolated process and electrical enclosures
  • CDA-purge function for electrical enclosure
  • Application of intrinsic safety protection design and technique for flammable gas systems
  • Audible and visual alarms and warnings
  • Local and remote EMO
  • Exhaust flow detection
  • Gas leak detection for toxic, corrosive and flammable gas systems
  • UV/IR and flame detection for flammable gas systems
  • Failure Modes and Effects Analysis (FMEA)


  • Pressure regulator with high corrosion-resistant Hastelloy internals for corrosive gas system
  • Individual in-line gas filter for each stick
  • Gas filter with high corrosion-resistant Hastelloy filter element for corrosive gas system
  • Trace heater system for low vapour pressure gas system
  • Door switch
  • Rate-anticipation heat detection switch
  • Alternative control system and protocols from other brands such as Allen Bradley, Mitsubishi, Omron, Schneider etc.

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