Gas Panel Fäth Gas Panel is engineered for safe handling of non-hazardous specialty gas from cylinder sources while complying with the applicable standards and guidelines of SEMI S2-0715 requirements. The gas panel enables inert gas to be delivered from cylinder sources to points of use. Alternatively, the gas panel can be connected to a Gas Valve Manifold Panel where the process gas can be distributed to the intended tools. The equipment design considerations span across several areas while conforming to regulatory requirements to ensure that operating objectives, as well as occupational health and safety standards, are consistently met. The gas panel is controlled using the integration of PLC and HMI to facilitate fully automatic operations that require minimal user intervention while providing the user with a visual overview of the system’s status at a glance. The gas panel incorporates standard safety features such as local and remote emergency-off functions. Other safety features can be included depending on the design of the gas panel. Kindly consult Fäth Asia for assistance in developing a system that meets your technical and commercial requirements. Standard Features Fully-automated gas cylinder switchover function for uninterrupted process gas delivery Automatic system shutdown from hardware safety interlocks Automatic manifold purge functions for gas cylinder change activity and system maintenance Individual tower light for each gas cylinder Optimal piping layout and design Process gas flow rate configurations of 30, 120, and 600 slpm of N2 In-line gas filter with greater than 0.0025 μm removal rating and 99.9999999% retention rating All scales, sensors, and transducers are connected to a manifold with connectors for easy component maintenance and replacement Auxiliary media pressure sensors for venturi and pneumatic system SEMI S2-0715 compliant Enclosure Features 11-gauge, non-combustible, and corrosion-resistant EG steel enclosure with chemical-resistant coating Adjustable platforms to accommodate small-sized gas cylinders Foldaway base flap for atilt gas cylinder rolling into the gas cabinet to improve ergonomics Platform with durable elastomer mat to increase friction and prevent slippage Control System Siemens SIMATIC S7 series PLC Siemens SIMATIC Comfort Panel HMI User authorization and password protection HMI Multilingual operational guide on HMI Manual actuation of pneumatic valves Linkage to supervisory control and data acquisition (SCADA) system for remote system monitoring and control Safety Features Isolated process and electrical enclosures CDA-purge function for electrical enclosure Audible and visual alarms and warnings Local and remote EMO Failure Modes and Effects Analysis (FMEA) Options Integrated valve bodies for reduced footprint, leak points and dead legs Heater jacket and trace heater system for low vapour pressure gas system Excessive flow switch Rupture disc for high delivery pressure detection Weigh scale for liquefied gas system Alternative control systems and protocols from other brands such as Allen Bradley, Mitsubishi, Omron, Schneider, etc.
