Specialty Gas Distribution System

Faeth Asia Specialty Gas Distribution System
BSGS FR (2)

Fäth Bulk Specialty Gas System is engineered for safe handling of hazardous or non-hazardous specialty gas from bulk gas sources such as tank trucks, tube trailers, y-cylinders, and gas bundles. The system enables process gas to be delivered with a high flow rate from bulk gas sources to valve distribution manifold boxes or panels where the process gas can be distributed to intended points of use. The system is commonly integrated with an efficient heating system to prevent contamination or corrosion caused by condensation due to temperature change from the Joule-Thomson effect that can occur when gas flowing at a high flow rate passes through the valve or pressure regulator which acts as a throttling device.

GasServant-800 is ideal for the safe storage and handling of hazardous specialty gas from cylinder sources. The gas cabinet enables hazardous gas to be delivered from cylinder sources inside an exhausted cabinet to points of use safely with various safety features that are 100% tested. The system is designed to maximize automation and decrease downtime to optimize operational efficiency. Alternatively, the gas cabinet can be connected to a Gas Valve Manifold Box where the process gas can be distributed to the intended tools.

GC FR (1)
GP FR (1)

Fäth Gas Panel is engineered for safe handling of non-hazardous specialty gas from cylinder sources while complying with the applicable standards and guidelines of SEMI S2-0715 requirements. The gas panel enables inert gas to be delivered from cylinder sources to points of use. Alternatively, the gas panel can be connected to a Gas Valve Manifold Panel where the process gas can be distributed to the intended tools.

Fäth Gas Valve Manifold Box is designed to distribute hazardous specialty gas from Bulk Specialty Gas Systems or Gas Cabinets while complying with applicable standards and guidelines to ensure that occupational health and safety standards are consistently met. The system is controlled using the integration of PLC and HMI to facilitate semi-automatic operations while providing the user with a visual overview of the system’s status at a glance. Various safety features are incorporated into the system to detect hazards and perform necessary functions automatically to mitigate accidents.

VMB FR (2)
VMP FR (2)

Fäth Gas Valve Manifold Panel is designed to distribute non-hazardous specialty gas from Bulk Specialty Gas Systems or Gas Panels while complying with applicable design standards and guidelines. The design of the panel is optimized to minimize equipment footprint, simplify installation and operate without the need for electrical controllers. Various features can be incorporated into the panel such as remote pressure monitoring system or a leak detector among many others.

Fäth Purge Gas Panel is a low-cost gas panel with economic design for inert gas delivery applications. It is primarily design to deliver purified nitrogen gas from cylinder sources to systems that require purge gas for manifold purging operations. The design of the panel is optimized to minimize equipment footprint, simplify installation and operate without the need for electrical controllers while providing a steady flow of purified nitrogen gas at a constant pressure. Various features can be incorporated into the panel such as remote pressure monitoring system or a leak detector among many others.

PP FR (3)