Solvent Waste Collection System

Fäth Solvent Waste Collection System is engineered for safe collection and disposal of solvent wastes, namely photoresist, after use in wafer cleaning processes. The system incorporates safety features and designs applicable in the international design codes and standards due to the flammable and combustible nature of solvents. The system is commonly designed to collect solvent wastes from wafer production floors via gravitational flow into stainless steel drums. The system utilizes enhanced weight measurement and control applications that is commonly paired with capacitive level sensors to perform fully-automated solvent waste collection drum switchover with high reliability.

The equipment design considerations span across several areas while conforming to regulatory requirements to ensure that operating objectives as well as occupational health and safety standards are consistently met. The system is controlled using the integration of PLC and HMI to facilitate fully-automatic operations that require minimum user intervention while providing the user with a visual overview of the system’s status at a glance. Various safety features are incorporated into the system to detect hazards and perform necessary functions automatically to mitigate accidents.

Kindly consult Fäth Asia for assistance in developing a system that meets your technical and commercial requirements.

Standard Features

  • Fully-automated drum switchover function for uninterrupted solvent waste collection
  • Automatic system shutdown from hardware safety interlocks
  • Optimal piping layout and design
  • Diaphragm pump with pulsation dampeners, stroke counter and leak detection
  • Overfill detection sensor
  • Sump pump
  • Auxiliary media pressure sensors for pneumatic system

System Control

  • Siemens SIMATIC S7 series PLC
  • Siemens SIMATIC Comfort Panel HMI
  • User authorisation and password protection HMI
  • Multilingual operational guide on HMI
  • Manual actuation of pneumatic valves
  • Linkage to supervisory control and data acquisation (SCADA) system for remote system monitoring and control

Safety Features

  • 11-gauge stainless steel 304L enclosure
  • Isolated process and electrical enclosures
  • Automatic Z-purge function with controller for electrical enclosure
  • Application of intrinsic safety protection design and technique
  • Audible and visual alarms and warnings
  • Local and remote EMO
  • Exhaust flow detection
  • UV/IR and flame detection
  • Cabinet leak detection
  • Utility service leak detection
  • Door interlock system
  • Flame arrestor
  • Failure Modes and Effects Analysis (FMEA)

Options

  • Enclosure capacity to accommodate up to 8 drums
  • Drum capacity up to 200 L
  • Rate-anticipation heat detection switch

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