Chemical Distribution System

Faeth Asia Chemical Distribution System

Fäth Chemical Dispense Module is engineered for safe handling and distribution of hazardous liquid chemicals, namely acids, and bases to points of use across a fab-wide distribution loop using advanced and sophisticated pumping technology. The system design and component selection involve meticulous engineering to provide a high order of efficiency and reliability. The system is commonly paired with Fäth Chemical Transfer Unit and a day tank to provide a continuous supply of liquid chemicals for high consumptions. For liquid chemicals that require simple mixing processes such as dilution, the system is paired with Fäth Chemical Blend Unit that utilizes static mixers to perform a continuous mixing process. The system is integrated with modern and precise metrology to ensure that only liquid chemical with high quality is delivered consistently.

Fäth Chemical Transfer Unit pumps liquid chemicals from chemical drums or totes into tanks attached to Fäth Chemical Dispense Module or Chemical Blend and Dispense Unit. Alternatively, liquid chemicals can be transferred to Fäth Chemical Blend Unit for simple mixing processes before the homogenous mixture is transferred into the day tank. Various modes of chemical recirculation sequences are available to vent out accumulated air before drum switchover. The system utilizes integrated control and safety systems to thin out the number of redundant and unique components. This design benefits the users from reduced downtime due to less waste and fewer parts to maintain and replace.

Fäth Chemical Blend Unit is designed to blend up to 3 different liquid chemicals using precision-engineered static mixers. The flow rates of the liquid chemicals are measured with leading-edge flow meters that exploit the latest electric sensing technology for greater control of process variables. The intricate design allows up to 1% full-scale accuracy for critical measurements and minimizing dead volume in the system. The built-in modern and sophisticated metrology ensures that only a homogenous mixture with high quality is delivered consistently. The continuous mixing process enables simultaneous filling and consumption of a single-day tank to promote footprint optimization. The system design emphasizes optimizing sustainability and reliability while reducing energy consumption by using an economical design approach.

Fäth Chemical Transfer and Blend Unit is a product of economical design and precise engineering to promote cost, operational, and footprint optimization. Fundamentally, it is a combination of Fäth Chemical Transfer Unit and Chemical Blend Unit into a single module that transfers liquid chemicals from chemical drums or totes to be blended with other liquid chemicals via static mixers within the system and then delivered to a day tank after a fully automatic chemical quality analysis. A single module with the ability to perform the processes of 2 separate systems without compromising the quality of the homogeneous mixture significantly benefits the return of investment from reduced energy consumption and waste generation.

Fäth Chemical Transfer and Dispense Module is a product of economical design and engineering to promote cost, operational, and footprint optimization. It is essentially a compound module of Fäth Chemical Transfer Unit and Chemical Dispense Unit that allows liquid chemicals to be transferred from chemical drums or totes and delivered to points of use distributed across a fab-wide distribution loop by utilizing advanced and sophisticated pumping technology. A single module with the ability to perform the processes of 2 separate systems significantly benefits the return of investment from reducing energy consumption and waste generation.

Fäth Chemical Blend and Dispense Unit is a product of avant-garde technology and modern engineering that supplies consistently high-quality homogeneous blends of liquid chemicals at a push of a button. The system utilizes enhanced weight measurement and control applications capable of delivering high-precision data from milligrams to tons. This system enables complex filling and blending of up to 6 different process chemicals. The PID controller enables efficient and automatic control of the pumps’ input speed with feedback pressure in the loop. This ensures that the dispense pressure is always maintained to facilitate the high demands of wafer fabrication process tools at any given time. The metrology system utilizes digital refractometers to monitor the consistency of concentrations with explicit accuracy via optical measurements of the liquid chemicals’ refractive index and temperature in real-time, ensuring high process efficiency and reliability.

Fäth Chemical Valve Manifold Box is installed in the delivery loop of Fäth Chemical Dispense Module or Chemical Blend and Dispense Unit to distribute liquid chemicals to wafer fabrication process tools. The system features an optimized layout and piping design to minimize equipment footprint and promote ease of installation, service, and maintenance. The system is designed with a large and clear PVC door for enhanced visibility and accessibility. The system has a built-in leak sensor to detect leaks inside the cabinet.